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Author Aaltonen, L. ♦ Saukoski, M. ♦ Halonen, K.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2006
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Electrostatics ♦ Voltage control ♦ Micromechanical devices ♦ Charge pumps ♦ Clocks ♦ Force control ♦ Circuits ♦ Gyroscopes ♦ Switches ♦ Medium voltage
Abstract Micromechanical structures with capacitive readout provide a feasible alternative for feedback by utilizing electrostatic forces without any requirement for additional electrodes. For this purpose high voltages are often required. This paper presents circuit structures for on-chip high voltage generation. A high voltage amplifier with digitally controllable output or a high voltage DAC is implemented and, as an example application, the DAC is used for quadrature compensation of a microelectro-mechanical gyroscope. The implemented high voltage generator achieves output voltages between zero and 27 V in 29 mV steps. The charge pump output voltage is limited in all cases to prevent reliability problems
Description Author affiliation: Electron. Circuit Design Lab., Helsinki Univ. of Technol. (Aaltonen, L.; Saukoski, M.; Halonen, K.)
ISBN 1424400759
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2006-09-10
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 966.89 kB
Page Count 4
Starting Page 583
Ending Page 586

Source: IEEE Xplore Digital Library