Access Restriction

Author Pei-Nong Chen ♦ Chen-Fu Chien ♦ Sheng-Jen Wang ♦ Chien-Chung Chen ♦ Haw-Jyue Luo
Sponsorship Taiwan Semiconductor Ind. Assoc. ♦ IEEE Electron Devices Soc. Taipei Chapter
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2004
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Alarm systems ♦ Testing ♦ Monitoring ♦ Data engineering ♦ Random access memory ♦ Fabrication ♦ Signal processing ♦ Data mining ♦ Power system modeling ♦ Manufacturing processes
Abstract When a new equipment or process is released, it is critical to ensure it behave as expected and stay in normal condition. The study proposes a research framework in which a statistical model is constructed for newly released equipment and process monitoring. An empirical study is conducted in a DRAM fabrication facility for validation. Based on the model, a best set of sample test items which discriminates the newly released equipment is selected and a group of normal equipments is obtained. Thus, the alarm signals can be triggered in an early warning system.
Description Author affiliation: Nat. Tsing Hua Univ., Hsinchu, Taiwan (Pei-Nong Chen; Chen-Fu Chien)
ISBN 0780384695
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2004-09-09
Publisher Place Taiwan
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 277.53 kB
Page Count 4
Starting Page 174
Ending Page 177

Source: IEEE Xplore Digital Library