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Author Ravariu, F. ♦ Ravariu, C. ♦ Nedelcu, O. ♦ Babarada, F. ♦ Manea, E. ♦ Podaru, C.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2006
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Micropumps ♦ Micromechanical devices ♦ Mechanical systems ♦ Manufacturing ♦ Valves ♦ Ducts ♦ Silicon ♦ Biomembranes ♦ Piezoelectric effect ♦ Fluid flow ♦ charged bioliquids ♦ Modeling ♦ simulation ♦ MEMS ♦ membrane bending ♦ piezoelectric actuation
Abstract Due to the success of the Si technology in the micro electro mechanical systems MEMS - manufacturing, a lot of integrated micropumps were recently developed. The main structures don't have movable parts, like input/output valves, because they can be easily destroyed during the operation. This paper presents an integrated pump with diffuser and nozzle ducts. The silicon membrane of micropump is actuated by a PZT layer, using the reverse piezoelectric effect. Coventor simulations confirm the micropump functionality. The entire MEMS structure could perform two roles: (1) ensures the liquid flow through the micropump chamber or (2) serves to separate the negative positive ions contained in a carrier bioliquid. Some simulations results aid to design the micropump for a possible application electrophoresis. However, the main aim of this paper was to simulate the mechanical stress produced by an electrical stimulus in a complex MEMS structure
Description Author affiliation: Nat. Inst. for R&D in Microtechnol., Bucharest (Ravariu, F.)
ISBN 1424401097
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2006-09-27
Publisher Place Romania
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 3.54 MB
Page Count 4
Starting Page 193
Ending Page 196


Source: IEEE Xplore Digital Library