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Author Pavelescu, L.
Sponsorship IEEE-Electron Devices Soc.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2001
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Optical design ♦ Silicon ♦ Integrated optics ♦ Optical interferometry ♦ Optical sensors ♦ Optical waveguides ♦ Biomembranes ♦ Performance analysis ♦ Analytical models ♦ Photoelasticity
Abstract In this work, simplified design relationships for silicon integrated optical pressure sensors based on Mach-Zehnder interferometry with antiresonant reflecting optical waveguides are derived. In principle, the analysed sensors are made of a striploaded Mach-Zehnder interferometer (MZI), which is placed on a micromachined rectangular silicon membrane as a pressure sensitive element. Analysis and simulation of optomechanical effects including both photoelastic transduction principles and the photonic transport are performed.
Description Author affiliation: Nat. Inst. for R&D in Microtechnologies, Bucharest, Romania (Pavelescu, L.)
ISBN 0780366662
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2001-10-09
Publisher Place Romania
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 365.31 kB
Page Count 4
Starting Page 201
Ending Page 204


Source: IEEE Xplore Digital Library