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Author Dubuc, D. ♦ Rabbia, L. ♦ Saadaoui, M. ♦ Flourens, E. ♦ Ducarouge, B. ♦ Aissi, M. ♦ Boughriha, F. ♦ Grenier, K. ♦ Pons, P. ♦ Graffeuil, J. ♦ Plana, R.
Sponsorship IEEE-Electron Devices Soc. ♦ Minstr. Educ. & Res. ♦ IEEE-Romania Sect. ♦ Electron Devices Chapter
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2002
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Micromechanical devices ♦ Radio frequency ♦ Switches ♦ Biomembranes ♦ Radiofrequency microelectromechanical systems ♦ Electrostatics ♦ Electromagnetic modeling ♦ Finite difference methods ♦ Springs ♦ Millimeter wave technology
Abstract This paper investigates the design methods which can be used to predict MEMS behavior with high accuracy. We presents EM methods, mechanical and thermal methods, and finally the electrothermal concept.
Description Author affiliation: Lab. d'Autom. et d'Anal. des Syst., CNRS, Toulouse, France (Dubuc, D.; Rabbia, L.; Saadaoui, M.; Flourens, E.; Ducarouge, B.; Aissi, M.; Boughriha, F.; Grenier, K.; Pons, P.; Graffeuil, J.; Plana, R.)
ISBN 0780374401
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2002-10-08
Publisher Place Romania
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 543.38 kB
Page Count 6
Starting Page 13
Ending Page 18


Source: IEEE Xplore Digital Library