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Author Liao, C.-Z. ♦ Chang, Y.-F. ♦ Yang, D. ♦ Jiang, B.
Sponsorship Taiwan Semiconductor Ind. Assoc. ♦ IEEE Electron Devices Soc. Taipei Chapter
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2004
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Water resources ♦ Cleaning ♦ Fabrication ♦ Resins ♦ Contamination ♦ Hafnium ♦ Cooling ♦ Costs ♦ Cities and towns ♦ Conductivity
Abstract This article was introduced the example of water saving in 8-inches semiconductor plant of UMC-8E plant. The technology and strategy was established by the water character, which included the recovery source, POU demand, environmental impact and running cost. We select the RO as a main unit in recovery system of waste water because the condition of environment and cost can be matched. The process recovery rate can be exceeded 85% after this saving strategy was practiced. This accomplishment was hard to achieve for the old plant, so we obtained the honor of water saving in 2002.
Description Author affiliation: United Microelectronics Corp., Hsinchu, Taiwan (Liao, C.-Z.; Chang, Y.-F.; Yang, D.; Jiang, B.)
ISBN 0780384695
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2004-09-09
Publisher Place Taiwan
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 262.99 kB
Page Count 5
Starting Page 54
Ending Page 58


Source: IEEE Xplore Digital Library