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Author Xiaotun Qiu ♦ Rui Tang ♦ Jie Zhu ♦ Hongyu Yu ♦ Ziyu Wang ♦ Oiler, J.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2010
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Film bulk acoustic resonators ♦ Resonant frequency ♦ Temperature sensors ♦ Sensitivity ♦ Zinc oxide ♦ Young's modulus
Abstract This paper investigated an infrared (IR) sensitive Lateral Field Excitation (LFE) Film Bulk Acoustic Resonator (FBAR). The resonant frequency of the LFE FBAR decreased when there was IR (peak wavelength at 750nm) illumination on the device. A linear relationship between the resonant frequency and the IR intensity was obtained with a detection limit of 9 $µW/mm^{2}.$ The sensing mechanism is attributed to the fact that the Young's modulus of the resonator material (ZnO) depends on temperature. In general, for a resonator operating in a bulk mode, a change in the Young's modulus translates into a shift of the resonant frequency. Thus, the sensitivity of the FBAR relies on its temperature coefficient of resonant frequency (TCF). Thickness Field Excitation (TFE) FBAR possessed a larger TCF. However, it showed a lower sensitivity to IR compared with the LFE FBAR. This was due to the reflection of IR radiation from the top electrode on the TFE FBAR.
Description Author affiliation: School of Earth and Space Exploration, Arizona State University, Tempe, USA (Ziyu Wang; Oiler, J.) || School of Electrical, Computer and Energy Engineering, Arizona State University, Tempe, USA (Xiaotun Qiu; Rui Tang; Jie Zhu; Hongyu Yu)
ISBN 9781424481705
ISSN 19300395
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2010-11-01
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
e-ISBN 9781424481699
Size (in Bytes) 603.56 kB
Page Count 4
Starting Page 623
Ending Page 626


Source: IEEE Xplore Digital Library