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Author Saharil, F. ♦ Tamsir, A.S. ♦ Majlis, B.Y.
Sponsorship Mems Technol.(M) Sdn, Bhd ♦ Kriptic Devices (M) Sdn Bhd ♦ IEEE Electron Devices Soc
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2002
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Fingers ♦ Microelectromechanical systems ♦ Micromechanical devices ♦ Electrodes ♦ Capacitance ♦ Shape ♦ Voltage ♦ Bandwidth ♦ Fabrication ♦ Numerical analysis
Abstract This paper presents new analytical study on the capacitive accelerometer's fingers which utilizes branched comb finger electrode instead of the conventional straight finger electrode. It employs capacitive sensing using overlap-area variation between comb electrode and the suspension beam to provide higher sensitivity without compromising pull-in voltage, full-scale range, or bandwidth besides the ease of fabrication. Mathematical formulations of each structure are derived and analyzed using numerical analysis. Three shapes of finger electrodes, which consist of branched fingers, triangle shaped fingers and semi-circle shaped fingers are compared to obtain the optimal shape with the highest capacitance and sensitivity. The result shows that the semi-circle shaped electrodes have the highest capacitance of 915 fF and sensitivity of -449.4 pF//spl mu/m for a single 240 /spl mu/m/spl times/4.6 /spl mu/m suspension beam with 3 /spl mu/m structure thickness followed by the triangle shaped fingers with capacitance of 29 fF and -124.7 pF//spl mu/m and the branched comb fingers with 42.5 fF and -106.3 pF//spl mu/m.
Description Author affiliation: Fac. of Eng., Univ. Kebangsaan Malaysia, Selangor, Malaysia (Saharil, F.; Tamsir, A.S.; Majlis, B.Y.)
ISBN 0780375785
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2002-12-19
Publisher Place Malaysia
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 280.08 kB
Page Count 5
Starting Page 552
Ending Page 556


Source: IEEE Xplore Digital Library