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Author Yi Chiu ♦ Hao-Chiao Hong ♦ Po-Chih Wu
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©2012
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Oscillators ♦ Accelerometers ♦ Micromechanical devices ♦ Resonant frequency ♦ Acceleration ♦ Sensitivity ♦ Frequency measurement
Abstract This paper presents a CMOS-MEMS accelerometer based on differential LC-tank oscillators. Two LC-tank oscillators composed of differential MEMS capacitors and suspended inductors were designed and fabricated by standard TSMC 0.18 μm CMOS processes and post-CMOS dry etching. The outputs of the differential oscillators are mixed and the output frequency of the mixer is proportional to the capacitance change caused by external acceleration. The device has been characterized and has a mechanical resonance frequency of 3.3 kHz, sensitivity of 3.7 MHz/g, and nonlinearity of 1.8%.
Description Author affiliation: Department of Electrical and Computer Engineering, National Chiao Tung University, Hsin Chu, Taiwan, R.O.C. (Yi Chiu; Hao-Chiao Hong; Po-Chih Wu)
ISBN 9781457717666
ISSN 19300395
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2012-10-28
Publisher Place Taiwan
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
e-ISBN 9781457717673
Size (in Bytes) 1.15 MB
Page Count 4
Starting Page 1
Ending Page 4

Source: IEEE Xplore Digital Library