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Author Milor, L. ♦ Hill, G. ♦ Yeng Peng
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©1999
Language English
Subject Domain (in DDC) Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Yield estimation ♦ Monitoring ♦ Delta modulation ♦ Uncertainty ♦ Load forecasting ♦ Testing ♦ Distributed decision making ♦ Digital TV
Abstract It is often desirable to forecast the random yield of each layer of new products. In this work we provide a yield forecasting methodology based on critical area, which goes beyond comparing die areas of products and accounts for layout density. This methodology forecasts the random yield loss per metal or poly layers by comparing the critical area of single layer defect monitors (DMs) to that of the product. In this paper, we discuss the design of DMs and sources of inaccuracy in product yield estimation based on DM data. In addition, we show how DMs can be useful in forecasting how the sizing of metal, poly, and local interconnect layers impacts random layer yield.
Description Author affiliation: AMD, Sunnyvale, CA, USA (Milor, L.)
ISBN 0780354036
ISSN 1523553X
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research ♦ Reading
Education Level UG and PG
Learning Resource Type Article
Publisher Date 1999-10-11
Publisher Place USA
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Size (in Bytes) 264.28 kB
Page Count 4
Starting Page 99
Ending Page 102


Source: IEEE Xplore Digital Library