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Author Nakamura, N. ♦ Yoshimura, N. ♦ Ogi, H. ♦ Hirao, M.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ ANTENNAS ♦ ATOMIC FORCE MICROSCOPY ♦ COMPARATIVE EVALUATIONS ♦ DEPOSITION ♦ INTERNAL FRICTION ♦ METALS ♦ MORPHOLOGY ♦ QUARTZ ♦ RESONANCE ♦ SPECTROSCOPY ♦ SUBSTRATES ♦ THIN FILMS ♦ ULTRASONIC WAVES
Abstract Dynamics of continuous film formation of metallic films on quartz substrates is studied using an electrodeless resonance method. Bare quartz is used as a substrate, and a metallic film is deposited on it. We use antenna transmission technique to measure the evolution of resonance frequencies and internal friction of the substrate during and after deposition, and the morphological transition between discontinuous islands and a continuous film is detected. By comparison with atomic force microscopy images, we confirm that the frequency drop and the internal-friction peak that appear during deposition indicate this transition. We also find that Pt film shows unexpected morphology change after deposition.
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2015-08-28
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 118
Issue Number 8


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