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Author Datskos, P. G. ♦ Oden, P. I. ♦ Thundat, T. ♦ Wachter, E. A. ♦ Warmack, R. J. ♦ Hunter, S. R.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS ♦ INFRARED RADIATION ♦ RADIATION DETECTION ♦ PIEZOELECTRICITY ♦ DESIGN ♦ HEAT SINKS ♦ STRESSES ♦ BENDING ♦ ABSORPTION ♦ SENSORS
Abstract A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one ({lt}ms) and a slower one ({approximately}10 ms). A noise equivalent power (at a modulation frequency of 30 Hz) was estimated to be {approximately}70 nW/Hz{sup 1/2}. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors. {copyright} {ital 1996 American Institute of Physics.}
ISSN 00036951
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-11-01
Publisher Department Oak Ridge National Laboratory
Publisher Place United States
Journal Applied Physics Letters
Volume Number 69
Issue Number 20
Organization Oak Ridge National Laboratory


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