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Author Anggraeni, G. P. ♦ Saripudin, A. ♦ Rusydi, A. ♦ Darma, Y.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ♦ ANISOTROPY ♦ CHEMICAL VAPOR DEPOSITION ♦ COMPARATIVE EVALUATIONS ♦ CONCENTRATION RATIO ♦ ELLIPSOMETRY ♦ INTERFACES ♦ LAYERS ♦ OPTICAL PROPERTIES ♦ ORGANOMETALLIC COMPOUNDS ♦ RUTILE ♦ SCANNING ELECTRON MICROSCOPY ♦ SUBSTRATES ♦ TEMPERATURE RANGE 0273-0400 K ♦ THIN FILMS ♦ TITANIUM OXIDES ♦ VISIBLE RADIATION ♦ X-RAY DIFFRACTION
Abstract Vertically arranged columnar TiO{sub 2}:Co structure has been deposited on Si (100) substrate using the metal organic chemical vapor deposition (MOCVD) technique. SEM images confirm the columnar structure of the TiO{sub 2}:Co layer on Si (100). Concentration of the Co dopant has been defined by means of the energy dispersive x-ray (EDX) spectra. Co concentrations are varied at 0.18, 0.33, and 0.68 at. % using pure TiO{sub 2} as the reference. X-ray diffraction (XRD) spectra show that the TiO{sub 2}:Co layer have a rutile phase. Further analysis of this structure has been performed by using room temperature spectroscopic ellipsometry (SE) measurements in the energy range of 0.5 - 6.5 eV. This optical response shows the unique feature of significantly high density fringe especially below the band gap energy region (lower than 3.3 eV) in contrast to the conventional TiO{sub 2} thin film structure. This unique feature is interpreted as a dominant contribution of the vertical interfaces at columnar boundaries towards reflected light from the sample. The evolution of Ψ and Δ will be discussed as the function of Co concentration and some optical properties will be extracted after reasonably well data fitting by multilayer modelling. Furthermore, by comparing the SE data from different measurement orientations, it has been shown that TiO{sub 2}:Co tends to be anisotropic. This study enables us to further evaluate structural properties through optical responses given by SE measurement.
ISSN 0094243X
Educational Use Research
Learning Resource Type Article
Publisher Date 2015-09-30
Publisher Place United States
Volume Number 1677
Issue Number 1


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