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Author Ogasawara, M. ♦ Okuda, Y. ♦ Shirai, M. ♦ Mitsuhashi, S. ♦ Hatayama, A.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword PLASMA PHYSICS AND FUSION ♦ PHYSICS ♦ HYDROGEN 1 MINUS BEAMS ♦ ION SOURCES ♦ GAS FLOW ♦ PLASMA FLUID EQUATIONS ♦ PLASMA SIMULATION ♦ ELECTRON TEMPERATURE ♦ MEDIUM VACUUM ♦ PARTIAL PRESSURE
Abstract Actual gas supply into the ion source is modeled. Filling pressure is related to gas flow rate and conductance of the H{sup {minus}} extraction system. The rate equation for the H{sub 2} molecule with gas inflow and outflow rates related with the filling pressure are employed in the numerical simulation of a negative hydrogen ion source. With the results of numerical simulation, the H number conservation relation and pressure balance equation are shown to be inaccurate especially for higher electron temperature. Actually for 5 eV of electron temperature, lost H{sub 2} density amounts to 79{percent} and the pressure becomes 5 times the original pressure of 5 mTorr. Even for a low pressure of 3 mTorr, the lost fraction is 67{percent} for 5 eV of the electron temperature. This inaccuracy is large in high power and even for low pressure operation of the ion source. {copyright} {ital 1996 American Institute of Physics.}
ISSN 00346748
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-03-01
Publisher Place United States
Journal Review of Scientific Instruments
Volume Number 67
Issue Number 3
Technical Publication No. CONF-9509125-


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