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Author Underwood, J. H. ♦ Gullikson, E. M. ♦ Koike, M. ♦ Batson, P. J. ♦ Denham, P. E. ♦ Franck, K. D. ♦ Tackaberry, R. E. ♦ Steele, W. F.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS ♦ ADVANCED LIGHT SOURCE ♦ BEAM TRANSPORT ♦ OPTICAL SYSTEMS ♦ CALIBRATION STANDARDS ♦ BEAM BENDING MAGNETS ♦ EV RANGE 10-100 ♦ EV RANGE 100-1000 ♦ DESIGN ♦ EXTREME ULTRAVIOLET RADIATION ♦ MONOCHROMATORS ♦ MIRRORS ♦ GRATINGS ♦ REFLECTIVITY ♦ PHOTON BEAMS ♦ SYNCHROTRON RADIATION
Abstract This bending magnet beamline has been in operation since February 1995 for the characterization of optical elements (mirrors, gratings, multilayers, detectors, etc.) in the energy range 50{endash}1000 eV. Although it was designed primarily for precision reflectometry of multilayer reflecting optics for EUV projection lithography, it has capabilities for a wide range of measurements. The optics consist of a monochromator, a reflectometer, and refocusing mirrors to provide a small spot on the sample. The monochromator is a very compact, entrance-slitless, varied-line-spacing plane-grating design in which the mechanically ruled grating operates in the converging light from a spherical mirror working at high demagnification. Aberrations of the mirror are corrected by the line spacing variation, so that the spectral resolving power {lambda}/{Delta}{lambda} is limited by the ALS source size to about 7000. Wavelength is scanned by simple rotation of the grating with a fixed exit slit. The reflectometer has the capability of positioning the sample to within 10 {mu}m and setting its angular position to 0.002{degree}. LABVIEW{sup T}{sup M} based software provides a convenient interface to the user. The reflectometer is separated from the beamline by a differential pump and can be pumped down in 1/2 hour. Auxiliary experimental stations can be mounted behind the reflectometer. Results are shown that demonstrate the performance and operational convenience of the beamline {copyright} {ital 1996 American Institute of Physics.}
ISSN 00346748
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-09-01
Publisher Department Lawrence Berkeley National Laboratory
Publisher Place United States
Journal Review of Scientific Instruments
Volume Number 67
Issue Number 9
Technical Publication No. CONF-9510119-
Organization Lawrence Berkeley National Laboratory


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