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Author You, K. H. ♦ Seo, B. H. ♦ Kim, J. H. ♦ You, S. J. ♦ Kim, D. W. ♦ Na, B. K. ♦ Chang, H. Y.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword PLASMA PHYSICS AND FUSION TECHNOLOGY ♦ CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ COLLISIONS ♦ COMPARATIVE EVALUATIONS ♦ DISTRIBUTION FUNCTIONS ♦ ELECTRONS ♦ ENERGY SPECTRA ♦ LANGMUIR PROBE ♦ NEUTRAL PARTICLES ♦ PLASMA ♦ SIMULATION
Abstract As collisions between electrons and neutral particles constitute one of the most representative physical phenomena in weakly ionized plasma, the electron-neutral (e-n) collision frequency is a very important plasma parameter as regards understanding the physics of this material. In this paper, we measured the e-n collision frequency in the plasma using a calibrated cutoff-probe. A highly accurate reactance spectrum of the plasma/cutoff-probe system, which is expected based on previous cutoff-probe circuit simulations [Kim et al., Appl. Phys. Lett. 99, 131502 (2011)], is obtained using the calibrated cutoff-probe method, and the e-n collision frequency is calculated based on the cutoff-probe circuit model together with the high-frequency conductance model. The measured e-n collision frequency (by the calibrated cutoff-probe method) is compared and analyzed with that obtained using a Langmuir probe, with the latter being calculated from the measured electron-energy distribution functions, in wide range of gas pressure.
ISSN 1070664X
Educational Use Research
Learning Resource Type Article
Publisher Date 2016-03-15
Publisher Place United States
Journal Physics of Plasmas
Volume Number 23
Issue Number 3


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