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Author Hu, Zhiyu ♦ Thundat, T. ♦ Warmack, R. J.
Sponsorship (US)
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Publisher The American Physical Society
Language English
Subject Keyword HYDROGEN ♦ ABSORPTION ♦ ADSORPTION ♦ BENDING ♦ MERCURY ♦ PALLADIUM ♦ PARTIAL PRESSURE ♦ STRESSES ♦ THICKNESS ♦ THIN FILMS
Abstract The interaction between a vapor and a thin film adsorbed on one side of a bimaterial microcantilever produces differential stress, resulting in readily measurable curvatures of the cantilever structure. Depending upon the system studied, there exist two types of gas{endash}solid interaction: bulk-like absorption and surface-like adsorption. The absorption of hydrogen into palladium results in film expansion whose magnitude is governed by hydrogen partial pressure. The bending of a bimaterial microcantilever (palladium/silicon) due to hydrogen absorption depends on the thickness of the palladium film and is reversible but rate limited by a surface barrier. In contrast, the stress induced by adsorption of mercury onto a bimaterial (gold/silicon) cantilever is irreversible at room temperature, is rate limited by surface coverage, and is independent of the gold{endash}film thickness. {copyright} 2001 American Institute of Physics.
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2001-07-01
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 90
Issue Number 1


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