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Author Drevillon, B. ♦ Godet, C.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword MATERIALS SCIENCE ♦ AMORPHOUS STATE ♦ CRYSTAL-PHASE TRANSFORMATIONS ♦ GERMANIUM ♦ ENERGY BEAM DEPOSITION ♦ METALS ♦ ION COLLISIONS ♦ EXPERIMENTAL DATA ♦ SUBSTRATES ♦ TEMPERATURE DEPENDENCE ♦ COLLISIONS ♦ DATA ♦ DEPOSITION ♦ ELEMENTS ♦ INFORMATION ♦ NUMERICAL DATA ♦ PHASE TRANSFORMATIONS ♦ SURFACE COATING ♦ Other Materials- Structure & Phase Studies
Abstract The amorphous (a) to microcrystalline (..mu..c) transition, induced by the increase of the ion bombardment energy E/sub ion/ and the substrate temperature T/sub s/ , is investigated on glow-discharge deposited germanium thin films. This transition and the deposition of ..mu..c-Ge on metallic substrates are observed in situ by kinetic and spectroscopic phase modulated ellipsometry (SPME) over the range 1.7--4.5 eV. The ion bombardment energy corresponding to the transition a-..mu..c (E/sub ion/approx.120 eV) decreases as a function of T/sub s/ in the range 160--280 /sup 0/C. Decreasing E/sub ion/ (or T/sub s/) results in the reverse transition. The ..mu..c-a transition is found at a approx.50 eV (or approx.120 /sup 0/C) lower value, giving evidence of an epitaxial growth effect. The kinetics of the growth processes is deduced from the SPME data by using an effective medium approximation. The early stage of the growth is accurately described by the nucleation of microcrystalline islands at a 50 A level; the time dependence being coherent with a low surface mobility of the diffusing species. During the growth, a composition depth profile is observed; the approx.150 A thick surface layer being more amorphous than the bulk.
Educational Use Research
Learning Resource Type Article
Publisher Date 1988-07-01
Publisher Department Laboratoire de Physique des Interfaces et des Couches Minces (ER 258) Ecole Polytechnique-91128-Palaiseau Cedex, France
Publisher Place United States
Journal J. Appl. Phys.
Volume Number 64
Issue Number 1
Organization Laboratoire de Physique des Interfaces et des Couches Minces (ER 258) Ecole Polytechnique-91128-Palaiseau Cedex, France


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