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Author Rosli, Z. M. ♦ Kwan, W. L. ♦ Juoi, J. M.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword NANOSCIENCE AND NANOTECHNOLOGY ♦ ALUMINIUM COMPOUNDS ♦ BORON COMPOUNDS ♦ BORON NITRIDES ♦ COATINGS ♦ CONCENTRATION RATIO ♦ CRYSTALLOGRAPHY ♦ GAS FLOW ♦ GRAIN SIZE ♦ MAGNETRONS ♦ NANOCOMPOSITES ♦ NITROGEN COMPOUNDS ♦ SATURATION ♦ SPUTTERING ♦ SUBSTRATES ♦ TEMPERATURE DEPENDENCE ♦ TITANIUM BORIDES ♦ TITANIUM COMPOUNDS ♦ X-RAY DIFFRACTION ♦ X-RAY PHOTOELECTRON SPECTROSCOPY
Abstract Nanocomposite TiAlBN (nc-TiAlBN) coatings were successfully deposited via RF magnetron sputtering by varying the nitrogen-to-total gas flow ratio (R{sub N}), and substrate temperature (T{sub S}). All coatings were deposited on AISI 316 substrates using single Ti-Al-BN hot-pressed disc as a target. The grain size, phases, and chemical composition of the coatings were evaluated using glancing angle X-ray diffraction analysis (GAXRD) and X-ray photoelectron spectroscopy (XPS). Results showed that the grains size of the deposited nc-TiAlBN coatings were in the range of 3.5 to 5.7 nm and reached a nitride saturation state as early as 15 % R{sub N}. As the nitrogen concentration decreases, boron concentration increased from 9 at.% to 16.17 at.%. and thus, increase the TiB{sub 2} phase within the coatings. The T{sub S}, however, showed no significant effect either on the crystallographic structure, grain size, or in the chemical composition of the deposited nc-TiAlBN coating.
ISSN 0094243X
Educational Use Research
Learning Resource Type Article
Publisher Date 2016-07-19
Publisher Place United States
Volume Number 1756
Issue Number 1


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