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Author Xie, Bo ♦ Xing, Yonghao ♦ Wang, Yanshuang ♦ Chen, Jian ♦ Chen, Deyong ♦ Wang, Junbo
Source World Health Organization (WHO)-Global Index Medicus
Content type Text
Publisher Multidisciplinary Digital Publishing Institute
File Format HTM / HTML
Language English
Difficulty Level Medium
Subject Domain (in DDC) Natural sciences & mathematics ♦ Chemistry & allied sciences ♦ Life sciences; biology ♦ Physiology & related subjects ♦ Biochemistry ♦ Technology ♦ Medicine & health ♦ Human physiology ♦ Pharmacology and therapeutics ♦ Diseases ♦ Agriculture & related technologies ♦ Manufacture for specific uses ♦ Precision instruments & other devices
Subject Domain (in MeSH) Inorganic Chemicals ♦ Chemicals and Drugs ♦ Investigative Techniques ♦ Equipment and Supplies ♦ Analytical, Diagnostic and Therapeutic Techniques and Equipment ♦ Physical Phenomena ♦ Biological Sciences ♦ Natural Science Disciplines ♦ Physical Sciences ♦ Technology, Industry, and Agriculture ♦ Technology and Food and Beverages
Subject Keyword Discipline Biotechnology ♦ Glass ♦ Chemistry ♦ Microtechnology ♦ Instrumentation ♦ Pressure ♦ Silicon ♦ Vacuum ♦ Electrochemical Techniques ♦ Electrodes ♦ Equipment Design ♦ Metals ♦ Temperature ♦ Journal Article ♦ Research Support, Non-u.s. Gov't
Abstract This paper presents the fabrication and characterization of a resonant pressure microsensor based on SOI-glass wafer-level vacuum packaging. The SOI-based pressure microsensor consists of a pressure-sensitive diaphragm at the handle layer and two lateral resonators (electrostatic excitation and capacitive detection) on the device layer as a differential setup. The resonators were vacuum packaged with a glass cap using anodic bonding and the wire interconnection was realized using a mask-free electrochemical etching approach by selectively patterning an Au film on highly topographic surfaces. The fabricated resonant pressure microsensor with dual resonators was characterized in a systematic manner, producing a quality factor higher than 10,000 (~6 months), a sensitivity of about 166 Hz/kPa and a reduced nonlinear error of 0.033% F.S. Based on the differential output, the sensitivity was increased to two times and the temperature-caused frequency drift was decreased to 25%.
Description Country affiliation: China
Author Affiliation: Xie B ( State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. xiebo11@mails.ucas.ac.cn.); Xing Y ( University of Chinese Academy of Sciences, Beijing 100190, China. xiebo11@mails.ucas.ac.cn.); Wang Y ( State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. xingyonghao13@mails.ucas.ac.cn.); Chen J ( University of Chinese Academy of Sciences, Beijing 100190, China. xingyonghao13@mails.ucas.ac.cn.); Chen D ( State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China. wangeomshuang13@mails.ucas.ac.cn.); Wang J ( University of Chinese Academy of Sciences, Beijing 100190, China. wangeomshuang13@mails.ucas.ac.cn.)
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Reading ♦ Research ♦ Self Learning
Interactivity Type Expositive
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2015-09-21
Publisher Place Switzerland
e-ISSN 14248220
Journal Sensors
Volume Number 15
Issue Number 9


Source: WHO-Global Index Medicus