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Author Lazar, Josef ♦ Klapetek, Petr ♦ Valtr, Miroslav ♦ Hrabina, Jan ♦ Buchta, Zdenek ♦ Cip, Onrej ♦ Cizek, Martin ♦ Oulehla, Jindrich ♦ Sery, Mojmir
Source World Health Organization (WHO)-Global Index Medicus
Content type Text
Publisher Multidisciplinary Digital Publishing Institute
File Format HTM / HTML
Language English
Difficulty Level Medium
Subject Domain (in DDC) Technology ♦ Medicine & health
Abstract We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic. The system employs a full six-axis interferometric position measurement of the sample holder consisting of six independent interferometers. Here we report on description of alignment issues and accurate adjustment of orthogonality of the measuring axes. Consequently, suppression of cosine errors and reduction of sensitivity to Abbe offset is achieved through full control in all six degrees of freedom. Due to the geometric configuration including a wide basis of the two units measuring in y-direction and the three measuring in z-direction the angle resolution of the whole setup is minimize to tens of nanoradians. Moreover, the servo-control of all six degrees of freedom allows to keep guidance errors below 100 nrad. This small range system is based on a commercial nanopositioning stage driven by piezoelectric transducers with the range (200 × 200 × 10) µm. Thermally compensated miniature interferometric units with fiber-optic light delivery and integrated homodyne detection system were developed especially for this system and serve as sensors for othogonality alignment.
Description Country affiliation: Czech Republic
Author Affiliation: Lazar J ( Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. joe@isibrno.cz.); Klapetek P ( Czech Metrology Institute, Brno, Okruzní 31, Brno 638 00, Czech Republic. pklapetek@cmi.cz.); Valtr M ( Czech Metrology Institute, Brno, Okruzní 31, Brno 638 00, Czech Republic. mvaltr@cmi.cz.); Hrabina J ( Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. shane@isibrno.cz.); Buchta Z ( Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. buchta@isibrno.cz.); Cip O ( Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. ocip@isibrno.cz.); Cizek M ( Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. cizek@isibrno.cz.); Oulehla J ( Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. oulehla@isibrno.cz.); Sery M ( Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, Brno 612 64, Czech Republic. sery@isibrno.cz.)
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Reading ♦ Research ♦ Self Learning
Interactivity Type Expositive
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2014-01-07
Publisher Place Switzerland
e-ISSN 14248220
Journal Sensors
Volume Number 14
Issue Number 1


Source: WHO-Global Index Medicus