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Author Malek, C. K. ♦ Vladimirsky, Y. ♦ Vladimirsky, O. ♦ Scott, J. ♦ Craft, B. ♦ Saile, V.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword INSTRUMENTATION, INCLUDING NUCLEAR AND PARTICLE DETECTORS ♦ SYNCHROTRON RADIATION SOURCES ♦ MACHINING ♦ USES ♦ MICROSTRUCTURE ♦ FABRICATION ♦ X RADIATION ♦ STORAGE RINGS ♦ LITHOGRAPHY
Abstract The x-ray lithography and micromachining facility at CAMD is described. It consists of four dedicated beamlines and exposure stations using the synchrotron radiation delivered by the CAMD storage ring and 230 m{sup 2} of fully equipped clean room. The scientific and engineering activities exemplified by results of current studies are reported. {copyright} {ital 1996 American Institute of Physics.}
ISSN 00346748
Educational Use Research
Learning Resource Type Article
Publisher Date 1996-09-01
Publisher Place United States
Journal Review of Scientific Instruments
Volume Number 67
Issue Number 9
Technical Publication No. CONF-9510119-


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