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Author Kim, Sung Yun ♦ Choi, Won Seok ♦ Lee, Jae-Hyeoung ♦ Hong, Byungyou
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword MATERIALS SCIENCE ♦ CHEMICAL VAPOR DEPOSITION ♦ ELECTRODES ♦ FIELD EMISSION ♦ GRAPHENE ♦ HYDROGEN ♦ METHANE ♦ MICROWAVE RADIATION ♦ NANOSTRUCTURES ♦ PLASMA ♦ SCANNING ELECTRON MICROSCOPY ♦ SILICON ♦ SUBSTRATES ♦ SURFACES ♦ X-RAY SPECTROSCOPY
Abstract Highlights: • Well grown carbon nanowalls (CNWs) were obtained by using a microwave plasma enhanced chemical vapor deposition (PECVD) with methane and hydrogen gases on Si substrates. • CNWs were grown at the growth temperature of 850 °C showed the highest contact angle. • Raman analysis showed higher I{sub D}/I{sub G} value that the CNWs were grown at more than 850 °C growth temperature. - Abstract: A carbon nanowall (CNW) is a carbon-based nanomaterial that is constructed with vertical-structure graphenes. Thus, it effectively increases the reaction surface of electrodes. In this study, the substrate temperature effect on the growth of CNWs was investigated via microwave plasma enhanced chemical vapor deposition (PECVD) with methane (CH{sub 4}) and hydrogen (H{sub 2}) gases on silicon substrates. To find the growth mechanism of a CNW, its growth temperature was changed from 700 °C to 950 °C. The vertical and surface conditions of the grown CNWs according to the growth temperature were characterized via field emission scanning electron microscopy (FE-SEM). The energy-dispersive spectroscopy (EDS) measurements showed that the CNWs were composed solely of carbon.
ISSN 00255408
Educational Use Research
Learning Resource Type Article
Publisher Date 2014-10-15
Publisher Place United States
Journal Materials Research Bulletin
Volume Number 58


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