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Author Kurihara, Masaru ♦ Makabe, Toshiaki
Sponsorship (US)
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Publisher The American Physical Society
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ ELECTRIC FIELDS ♦ ELECTRODES ♦ MIXTURES ♦ PHYSICS ♦ PLASMA ♦ PLASMA PRODUCTION
Abstract The basic characteristics of a micro-cell plasma in a gas mixture sustained by a high-frequency voltage source with a ring-shaped electrode are described in this article. The key to maintaining a microcell plasma is to reduce wall loss and increase plasma production. The advantage of a gas mixture of Ne/Xe is the increase of the plasma production rate in a low electric field compared to that in pure gas. As a result, a microcell plasma can be sustained by a lower applied voltage by using a gas mixture of Ne/Xe under the same power condition as compared with that in pure Xe. {copyright} 2001 American Institute of Physics.
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2001-06-15
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 89
Issue Number 12


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