Thumbnail
Access Restriction
Open

Author Levine, Zachary H. ♦ Grantham, Steven ♦ Neogi, Suneeta ♦ Frigo, Sean P. ♦ McNulty, Ian ♦ Retsch, Cornelia C. ♦ Wang, Yuxin ♦ Lucatorto, Thomas B.
Sponsorship (US)
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Publisher The American Physical Society
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ ACCURACY ♦ COPPER ♦ CROSS SECTIONS ♦ ELECTRON MICROSCOPES ♦ INTEGRATED CIRCUITS ♦ RADON ♦ RESOLUTION ♦ TOMOGRAPHY
Abstract As part of an effort to develop high resolution microtomography for engineered structures, a two-level copper integrated circuit interconnect was imaged using 1.83 keV x rays at 14 angles employing a full-field Fresnel zone plate microscope. A major requirement for high resolution microtomography is the accurate registration of the reference axes in each of the many views needed for a reconstruction. A reconstruction with 100 nm resolution would require registration accuracy of 30 nm or better. This work demonstrates that even images that have strong interference fringes can be used to obtain accurate fiducials through the use of Radon transforms. We show that we are able to locate the coordinates of the rectilinear circuit patterns to 28 nm. The procedure is validated by agreement between an x-ray parallax measurement of 1.41{+-}0.17 {mu}m and a measurement of 1.58{+-}0.08 {mu}m from a scanning electron microscope image of a cross section.
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2001-07-15
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 90
Issue Number 2


Open content in new tab

   Open content in new tab