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Author Haislmaier, Ryan C. ♦ Stone, Greg ♦ Alem, Nasim ♦ Engel-Herbert, Roman
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ♦ CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ CALIBRATION ♦ DEPOSITS ♦ ELECTRON DIFFRACTION ♦ FILMS ♦ LAYERS ♦ MOLECULAR BEAM EPITAXY ♦ MOLECULAR BEAMS ♦ NITRATES ♦ PERIODICITY ♦ PEROVSKITE ♦ REFLECTION ♦ SHUTTERS ♦ STRONTIUM OXIDES ♦ STRONTIUM TITANATES ♦ THICKNESS ♦ TITANIUM OXIDES ♦ TRANSMISSION ELECTRON MICROSCOPY ♦ X-RAY DIFFRACTION
Abstract The synthesis of a 50 unit cell thick n = 4 Sr{sub n+1}Ti{sub n}O{sub 3n+1} (Sr{sub 5}Ti{sub 4}O{sub 13}) Ruddlesden-Popper (RP) phase film is demonstrated by sequentially depositing SrO and TiO{sub 2} layers in an alternating fashion using hybrid molecular beam epitaxy (MBE), where Ti was supplied using titanium tetraisopropoxide (TTIP). A detailed calibration procedure is outlined for determining the shuttering times to deposit SrO and TiO{sub 2} layers with precise monolayer doses using in-situ reflection high energy electron diffraction (RHEED) as feedback. Using optimized Sr and TTIP shuttering times, a fully automated growth of the n = 4 RP phase was carried out over a period of >4.5 h. Very stable RHEED intensity oscillations were observed over the entire growth period. The structural characterization by X-ray diffraction and high resolution transmission electron microscopy revealed that a constant periodicity of four SrTiO{sub 3} perovskite unit cell blocks separating the double SrO rocksalt layer was maintained throughout the entire film thickness with a very little amount of planar faults oriented perpendicular to the growth front direction. These results illustrate that hybrid MBE is capable of layer-by-layer growth with atomic level precision and excellent flux stability.
ISSN 00036951
Educational Use Research
Learning Resource Type Article
Publisher Date 2016-07-25
Publisher Place United States
Journal Applied Physics Letters
Volume Number 109
Issue Number 4


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