Thumbnail
Access Restriction
Open

Author Ecker, K. H. ♦ Merkle, K. L.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ GOLD ♦ SPUTTERING ♦ BISMUTH IONS ♦ COLLISIONS ♦ ARGON IONS ♦ SILVER IONS ♦ HELIUM IONS ♦ AMORPHOUS STATE ♦ KEV RANGE 100-1000 ♦ KEV RANGE 10-100 ♦ ATOMIC IONS ♦ CHARGED PARTICLES ♦ ELEMENTS ♦ ENERGY RANGE ♦ IONS ♦ KEV RANGE ♦ METALS ♦ TRANSITION ELEMENTS 640301* -- Atomic, Molecular & Chemical Physics-- Beams & their Reactions
Abstract Transmission sputtering yields of single and polycrystalline gold foils have been measured as a function of thickness in the range 250--5000 A for bombardments with 560-keV Bi, 400-keV Ag, 200- and 400-keV Ar, and 50-keV He ions. Good agreement is found between the yield curves for polycrystalline and single-crystalline targets oriented in a high-index (random) direction. Calculated distributions of energy deposition in an amorphous target compare well with regard to the position of the maximum in the sputter yield. Absolute yields in the vicinity of the peak are generally in better agreement with yields calculated by Monte Carlo simulation for finite targets than with yields calculated on the basis of transport theory in an infinite solid. Compared with theory, all measured yield curves exhibit considerable enhancement at great depths. Sputter-yield distributions for a beam of 560-keV Bi ions along < 100 > are in qualitative agreement with channeling theory. From a comparison with the random sputter-yield distributions, it can be concluded that channeling of such heavy projectiles causes a relatively minor reduction (< or approx. = 40%) in the total amount of energy that goes into nuclear motion.
Educational Use Research
Learning Resource Type Article
Publisher Date 1978-08-01
Publisher Place United States
Journal Phys. Rev., B
Volume Number 18
Issue Number 3
Organization Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439


Open content in new tab

   Open content in new tab