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Author Ayesh, A. I. ♦ Qamhieh, N. ♦ Ghamlouche, H. ♦ Thaker, S. ♦ El-Shaer, M.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword NANOSCIENCE AND NANOTECHNOLOGY ♦ AGGLOMERATION ♦ DEPOSITION ♦ FABRICATION ♦ GAS FLOW ♦ NANOSTRUCTURES ♦ OPTIMIZATION ♦ PALLADIUM ♦ PLASMA ♦ SOLID CLUSTERS ♦ SPUTTERING ♦ ELEMENTS ♦ FLUID FLOW ♦ METALS ♦ PLATINUM METALS ♦ TRANSITION ELEMENTS
Abstract We report on the fabrication of palladium (Pd) nanoclusters using a dc magnetron sputtering source. Plasma sputtering vaporizes the target's material forming nanoclusters by inert gas condensation. The sputtering source produces ionized nanoclusters that enable the study of the nanoclusters' size distribution using a quadrupole mass filter. In this work, the dependence of Pd nanoclusters' size distribution on various source parameters, such as the sputtering discharge power, inert gas flow rate, and aggregation length have been investigated. This work demonstrates the ability of tuning the palladium nanoclusters' size by proper optimization of the source operation conditions. The experimental nanocluster sizes are compared with a theoretical model that reveals the growth of large nanoclusters from 'embryos' by a two-body collision. The model is valid for a specific range of deposition parameters (low inert gas flow rates and aggregation lengths equal or below 70 mm).
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2010-02-15
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 107
Issue Number 3


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