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Author Zayarnyi, D. A. ♦ Ionin, A. A. ♦ Kudryashov, S. I. ♦ Makarov, S. V. ♦ Rudenko, A. A. ♦ Drozdova, E. A. ♦ Odinokov, S. B.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ♦ ABLATION ♦ INTERFERENCE ♦ LASER RADIATION ♦ PHOTORESISTORS ♦ SILVER ♦ SPALLATION ♦ SURFACES ♦ THIN FILMS
Abstract Specific features of ablation of a thin silver film with a 1-μm-thick layer of a highly transparent photoresist and the same film without a photoresist layer under single tightly focused femtosecond laser pulses in the visible range (515 nm) are experimentally investigated. Interference effects of internal modification of the photoresist layer, its spallation ablation from the film surface and formation of through hollow submicron channels in the resist without its spallation but with ablation of the silver film lying under the resist are found and discussed. (extreme light fields and their applications)
ISSN 10637818
Educational Use Research
Learning Resource Type Article
Publisher Date 2015-05-31
Publisher Place United States
Journal Quantum Electronics
Volume Number 45
Issue Number 5


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