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Author Meitzler, A.H.
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©1986
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Silicon ♦ Microcavities ♦ Resonant frequency ♦ Micromechanical devices ♦ Frequency measurement ♦ Vibration measurement ♦ Circuits ♦ Fabrication ♦ Electronic mail ♦ Grain size
Description Integrated circuit technology has been used to fabricate miniature disk resonators of polycrystalline silicon that operate at frequencies above 100 MHz. The ratios of low-order resonant frequencies in these resonators can be used to determine the value of Poisson's ratio and to confirm assumptions regarding homogeneity and isotropy.
ISSN 08853010
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2006-02-01
Publisher Place U.S.A.
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Volume Number 53
Issue Number 2
Size (in Bytes) 104.06 kB
Starting Page 264

Source: IEEE Xplore Digital Library