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Author Veijola, T. ♦ De Pasquale, Giorgio ♦ Somà, Aurelio
Source arXiv.org
Content type Text
File Format PDF
Date of Submission 2008-05-07
Language English
Subject Domain (in DDC) Computer science, information & general works
Subject Keyword Computer Science - Other Computer Science ♦ cs
Abstract Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of the perforated plates is almost translational, the surface shape is rectangular, and the perforation is uniform validating the assumptions made for compact models. In the structures, the perforation ratio varies from 24% - 59%. The study of the structure shows that the compressibility and inertia do not contribute to the damping at the frequencies used (130kHz - 220kHz). The damping coefficients given by all four compact models underestimate the measured damping coefficient by approximately 20%. The reasons for this underestimation are discussed by studying the various flow components in the models.
Description Reference: Dans Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - DTIP 2008, Nice : France (2008)
Educational Use Research
Learning Resource Type Article


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