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Author Bakar, Muhammad Hafiz Abu ♦ Li, Lam Mui ♦ Salleh, Saafie ♦ Alias, Afishah ♦ Mohamad, Khairul Anuar ♦ Sulaiman, Salina
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ♦ ANNEALING ♦ ARGON ♦ DEPOSITION ♦ EV RANGE ♦ GLASS ♦ OPACITY ♦ PLASTICS ♦ POSITRON COMPUTED TOMOGRAPHY ♦ PRESSURE DEPENDENCE ♦ P-TYPE CONDUCTORS ♦ SPUTTERING ♦ SUBSTRATES ♦ TEMPERATURE DEPENDENCE ♦ THIN FILMS ♦ VISIBLE RADIATION
Abstract A transparent p-type thin film CuGaO{sub 2} was deposited by using RF sputtering deposition method on plastic (PET) and glass substrate. The characteristics of the film is investigated. The thin film was deposited at temperature range from 50-250°C and the pressure inside the chamber is 1.0×10{sup −2} Torr and Argon gas was used as a working gas. The RF power is set to 100 W. The thickness of thin film is 300nm. In this experiment the transparency of the thin film is more than 70% for the visible light region. The band gap obtain is between 3.3 to 3.5 eV. The details of the results will be discussed in the conference.
ISSN 0094243X
Educational Use Research
Learning Resource Type Article
Publisher Date 2015-08-28
Publisher Place United States
Volume Number 1674
Issue Number 1


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