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Author Badreldin, T. ♦ Saad, T. ♦ Khalil, D.
Sponsorship IEEE Lasers and Electro-Optics Society ♦ Optical Society of America
Source IEEE Xplore Digital Library
Content type Text
Publisher Institute of Electrical and Electronics Engineers, Inc. (IEEE)
File Format PDF
Copyright Year ©1983
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Physics ♦ Electricity & electronics ♦ Technology ♦ Engineering & allied operations ♦ Applied physics
Subject Keyword Micromechanical devices ♦ Optical sensors ♦ Optical devices ♦ Monte Carlo methods ♦ Microelectromechanical systems ♦ Assembly systems ♦ Mirrors ♦ Microswitches ♦ Performance analysis ♦ Optical device fabrication ♦ process capability ♦ design for manufacturability ♦ Monte Carlo simulation ♦ optical microelectromechanical systems (MEMS)
Abstract We developed a statistical Monte Carlo technique for the performance estimation of optical microelectromechanical systems (MEMS) components taking into account the randomness nature of its assembly. The developed technique is applied on the 2/spl times/2 moving mirror optical MEMS switch as a typical example to study its performance under realistic passive-alignment conditions. The obtained results enable us to evaluate the assembly process capability and to analyze the performance sensitivity to different fabrication parameters. This enables us to establish a design for manufacturability technique for the optical MEMS components.
Description Author affiliation :: MEMSCAP, Cairo, Egypt
ISSN 07338724
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2005-02-01
Publisher Place U.S.A.
Rights Holder Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Volume Number 23
Issue Number 2
Size (in Bytes) 799.70 kB
Page Count 7
Starting Page 510
Ending Page 516


Source: IEEE Xplore Digital Library