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Author Yang, Yuchen ♦ Zhou, Xue ♦ Liu, Jason X. ♦ Anders, André
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ DIRECT CURRENT ♦ FLUCTUATIONS ♦ KHZ RANGE ♦ MAGNETRONS ♦ OSCILLATIONS ♦ PERIODICITY ♦ PHASE DIAGRAMS ♦ PLASMA ♦ POTENTIALS ♦ PROBES ♦ PULSES ♦ SPUTTERING
Abstract We present evidence for breathing modes in magnetron sputtering plasmas: periodic axial variations of plasma parameters with characteristic frequencies between 10 and 100 kHz. A set of azimuthally distributed probes shows synchronous oscillations of the floating potential. They appear most clearly when considering the intermediate current regime in which the direction of azimuthal spoke motion changes. Breathing oscillations were found to be superimposed on azimuthal spoke motion. Depending on pressure and current, one can also find a regime of chaotic fluctuations and one of stable discharges, the latter at high current. A pressure-current phase diagram for the different situations is proposed.
ISSN 00036951
Educational Use Research
Learning Resource Type Article
Publisher Date 2016-01-18
Publisher Place United States
Journal Applied Physics Letters
Volume Number 108
Issue Number 3


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