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Author Khoram, M. ♦ Ghomi, H. ♦ Navab Safa, N.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword PLASMA PHYSICS AND FUSION TECHNOLOGY ♦ CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY ♦ BOUNDARY CONDITIONS ♦ DIAGRAMS ♦ ELECTRIC POTENTIAL ♦ FINITE DIFFERENCE METHOD ♦ ION IMPLANTATION ♦ ION TEMPERATURE ♦ IONS ♦ NONLINEAR PROBLEMS ♦ PLASMA SHEATH ♦ PRESSURE DEPENDENCE
Abstract Here, a collisional magnetized plasma with finite ion temperature is considered to examine the effects of the ion temperature and gas pressure on the plasma-sheath dynamics. We use the two-fluid model of plasma-sheath where the nonlinear equations of a dynamic sheath are solved using a full implicit scheme of finite difference method along with some convenient initial and boundary conditions at the plasma center and target. It is found that the ion temperature only has a significant effect on the characteristics of low voltage sheath, while the gas pressure (collision rate) seriously affects the dynamic characteristics of the low and high voltage plasma-sheath. One can see, increasing the ion temperature in low voltage plasma-sheath causes to increase the temporal curve of the ion dose and the ion impact energy on the target, reduces the temporal curve of the sheath width, and has no any effect on the temporal curve of the ion incident angle on the target. However, rising the gas pressure in low and high voltage plasma-sheath reduces all of these temporal curves.
ISSN 1070664X
Educational Use Research
Learning Resource Type Article
Publisher Date 2016-03-15
Publisher Place United States
Journal Physics of Plasmas
Volume Number 23
Issue Number 3


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