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Author Hala, M. ♦ Viau, N. ♦ Zabeida, O. ♦ Klemberg-Sapieha, J. E. ♦ Martinu, L.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword PLASMA PHYSICS AND FUSION TECHNOLOGY ♦ ARGON ♦ CHROMIUM ♦ ELECTRIC CURRENTS ♦ ELECTRODES ♦ ELECTRONS ♦ EMISSION SPECTROSCOPY ♦ HIGH-FREQUENCY DISCHARGES ♦ MAGNETRONS ♦ NITROGEN ♦ PHOTOELECTRON SPECTROSCOPY ♦ PLASMA ♦ PLASMA DENSITY ♦ PLASMA DIAGNOSTICS ♦ PLASMA WAVES ♦ POWER DENSITY ♦ PULSES ♦ SPUTTERING ♦ TIME RESOLUTION ♦ TRANSIENTS ♦ CURRENTS ♦ ELECTRIC DISCHARGES ♦ ELECTRON SPECTROSCOPY ♦ ELECTRON TUBES ♦ ELECTRONIC EQUIPMENT ♦ ELEMENTARY PARTICLES ♦ ELEMENTS ♦ EQUIPMENT ♦ FERMIONS ♦ FLUIDS ♦ GASES ♦ LEPTONS ♦ METALS ♦ MICROWAVE EQUIPMENT ♦ MICROWAVE TUBES ♦ NONMETALS ♦ RARE GASES ♦ RESOLUTION ♦ SPECTROSCOPY ♦ TIMING PROPERTIES ♦ TRANSITION ELEMENTS
Abstract Time- and space-resolved optical emission spectroscopy and fast imaging were used for the investigation of the plasma dynamics of high-power impulse magnetron sputtering discharges. 200 {mu}s pulses with a 50 Hz repetition frequency were applied to a Cr target in Ar, N{sub 2}, and N{sub 2}/Ar mixtures and in a pressure range from 0.7 to 2.66 Pa. The power density peaked at 2.2-6 kW cm{sup -2}. Evidence of dominating self-sputtering was found for all investigated conditions. Up to four different discharge phases within each pulse were identified: (i) the ignition phase, (ii) the high-current metal-dominated phase, (iii) the transient phase, and (iv) the low-current gas-dominated phase. The emission of working gas excited by fast electrons penetrating the space in-between the electrodes during the ignition phase spread far outwards from the target at a speed of 24 km s{sup -1} in 1.3 Pa of Ar and at 7.5 km s{sup -1} in 1.3 Pa of N{sub 2}. The dense metal plasma created next to the target propagated in the reactor at a speed ranging from 0.7 to 3.5 km s{sup -1}, depending on the working gas composition and the pressure. In fact, it increased with higher N{sub 2} concentration and lower pressure. The form of the propagating plasma wave changed from a hemispherical shape in Ar, to a droplike shape extending far from the target in N{sub 2}. An important N{sub 2} emission rise in the latter case was detected during the transition at the end of the metal-dominated phase.
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 2010-02-15
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 107
Issue Number 4


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