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Author Lim, Sung Kyu ♦ Pan, David Z. ♦ Jung, Moongon ♦ Mitra, Joydeep
Source ACM Digital Library
Content type Text
Publisher Association for Computing Machinery (ACM)
File Format PDF
Language English
Abstract Three-dimensional integrated circuit (3D IC) with through-silicon-via (TSV) is believed to offer new levels of efficiency, power, performance, and form-factor advantages over the conventional 2D IC. However, 3D IC involves disruptive manufacturing technologies compared to conventional 2D IC. TSVs cause significant thermomechanical stress that may seriously affect performance, leakage, and reliability of circuits. In this paper, we discuss an efficient and accurate full-chip thermomechanical stress and reliability analysis tool as well as a design optimization methodology to alleviate mechanical reliability issues in 3D ICs. First, we analyze detailed thermomechanical stress induced by TSVs in conjunction with various associated structures such as landing pad and dielectric liner. Then, we explore and validate the linear superposition principle of stress tensors and demonstrate the accuracy of this method against detailed finite element analysis (FEA) simulations. Next, we apply this linear superposition method to full-chip stress simulation and a reliability metric named the von Mises yield criterion. Finally, we propose a design optimization methodology to mitigate the mechanical reliability problems in 3D ICs.
Description Affiliation: Georgia Institute of Technology GA (Jung, Moongon; Lim, Sung Kyu) || University of Texas at Austin TX (Mitra, Joydeep; Pan, David Z.)
Age Range 18 to 22 years ♦ above 22 year
Educational Use Research
Education Level UG and PG
Learning Resource Type Article
Publisher Date 2005-08-01
Publisher Place New York
Journal Communications of the ACM (CACM)
Volume Number 57
Issue Number 1
Page Count 9
Starting Page 107
Ending Page 115


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Source: ACM Digital Library