|Author||Kim, Kyurin ♦ Kim, Hyunsoo ♦ Cho, Jaehee ♦ Park, Jun Hyuk ♦ Kim, Jong Kyu ♦ Fred Schubert, E.|
|Source||United States Department of Energy Office of Scientific and Technical Information|
|Subject Keyword||CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ CORRELATIONS ♦ DEPOSITION ♦ DEPOSITS ♦ INDIUM ♦ INTERFACES ♦ MICROSTRUCTURE ♦ POROSITY ♦ REFRACTIVE INDEX ♦ SUBSTRATES ♦ THIN FILMS ♦ TIN OXIDES ♦ VARIATIONS|
|Abstract||Indium tin oxide (ITO) thin films deposited using the oblique angle deposition (OAD) technique exhibit a strong correlation between structural and optical properties, especially the optical bandgap energy. The microstructural properties of ITO thin films are strongly influenced by the tilt angle used during the OAD process. When changing the tilt angle, the refractive index, porosity, and optical bandgap energy of ITO films also change due to the existence of a preferential growth direction at the interface between ITO and the substrate. Experiments reveal that the ITO film's optical bandgap varies from 3.98 eV (at normal incident deposition) to 3.87 eV (at a 60° tilt angle)|
|Learning Resource Type||Article|
|Publisher Place||United States|
|Journal||Applied Physics Letters|
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