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Author Kim, Kyurin ♦ Kim, Hyunsoo ♦ Cho, Jaehee ♦ Park, Jun Hyuk ♦ Kim, Jong Kyu ♦ Fred Schubert, E.
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ♦ CORRELATIONS ♦ DEPOSITION ♦ DEPOSITS ♦ INDIUM ♦ INTERFACES ♦ MICROSTRUCTURE ♦ POROSITY ♦ REFRACTIVE INDEX ♦ SUBSTRATES ♦ THIN FILMS ♦ TIN OXIDES ♦ VARIATIONS
Abstract Indium tin oxide (ITO) thin films deposited using the oblique angle deposition (OAD) technique exhibit a strong correlation between structural and optical properties, especially the optical bandgap energy. The microstructural properties of ITO thin films are strongly influenced by the tilt angle used during the OAD process. When changing the tilt angle, the refractive index, porosity, and optical bandgap energy of ITO films also change due to the existence of a preferential growth direction at the interface between ITO and the substrate. Experiments reveal that the ITO film's optical bandgap varies from 3.98 eV (at normal incident deposition) to 3.87 eV (at a 60° tilt angle)
ISSN 00036951
Educational Use Research
Learning Resource Type Article
Publisher Date 2016-01-25
Publisher Place United States
Journal Applied Physics Letters
Volume Number 108
Issue Number 4


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