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Author Tian, Chunguang ♦ Jiang, Dayong ♦ Tan, Zhendong ♦ Duan, Qian ♦ Liu, Rusheng ♦ Sun, Long ♦ Qin, Jieming ♦ Hou, Jianhua ♦ Gao, Shang ♦ Liang, Qingcheng ♦ Zhao, Jianxun
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword MATERIALS SCIENCE ♦ ABSORPTION ♦ ANNEALING ♦ ATOMS ♦ CONCENTRATION RATIO ♦ CUBIC LATTICES ♦ DIFFUSION ♦ MAGNESIUM COMPOUNDS ♦ OPTICAL PROPERTIES ♦ PHOTODETECTORS ♦ QUARTZ ♦ RED SHIFT ♦ SEMICONDUCTOR MATERIALS ♦ SPUTTERING ♦ SUBSTRATES ♦ THIN FILMS ♦ ULTRAVIOLET RADIATION ♦ X-RAY DIFFRACTION ♦ ZINC OXIDES
Abstract Highlights: • Single-phase wurtzite/cubic Mg{sub x}Zn{sub 1−x}O films were grown by RF magnetron sputtering technique. • We focus on the red-shift caused by annealing the Mg{sub x}Zn{sub 1−x}O films. • MSM-structured visible-blind and solar-blind UV photodetectors were fabricated. - Abstract: A series of single-phase Mg{sub x}Zn{sub 1−x}O films with different Mg contents were prepared on quartz substrates by RF magnetron sputtering technique using different MgZnO targets, and annealed under the atmospheric environment. The absorption edges of Mg{sub x}Zn{sub 1−x}O films can cover the whole near ultraviolet and even the whole solar-blind spectra range, and the solar-blind wurtzite/cubic Mg{sub x}Zn{sub 1−x}O films have been realized successfully by the same method. In addition, the absorption edges of annealed films shift to a long wavelength, which is caused by the diffusion of Zn atoms gathering at the surface during the thermal treatment process. Finally, the truly solar-blind metal-semiconductor-metal structured photodetectors based on wurtzite Mg{sub 0.445}Zn{sub 0.555}O and cubic Mg{sub 0.728}Zn{sub 0.272}O films were fabricated. The corresponding peak responsivities are 17 mA/W at 275 nm and 0.53 mA/W at 250 nm under a 120 V bias, respectively.
ISSN 00255408
Educational Use Research
Learning Resource Type Article
Publisher Date 2014-12-15
Publisher Place United States
Journal Materials Research Bulletin
Volume Number 60


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