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Author Darab, John G. ♦ Matson, Dean W.
Source SpringerLink
Content type Text
Publisher Springer-Verlag
File Format PDF
Copyright Year ©1998
Language English
Subject Domain (in DDC) Natural sciences & mathematics ♦ Chemistry & allied sciences
Subject Keyword Hydrothermal processing ♦ iron oxide ♦ nano-crystalline particulates ♦ titanium oxide ♦ zirconium oxide ♦ Optical and Electronic Materials ♦ Characterization and Evaluation of Materials ♦ Electronics and Microelectronics, Instrumentation ♦ Solid State Physics and Spectroscopy
Abstract A wide range of nano-crystalline, single and multi-component oxide/oxyhydroxide particulates, which may be potentially useful as abrasives for chemical-mechanical planarization (CMP) processes, have been produced using a novel, flow-through hydrothermal technology previously developed at the Pacific Northwest National Laboratory. The process, termed rapid thermal decomposition of precursors in solution (RTDS), converts aqueous feed stock solutions containing metal salts and other thermally activated reactants into suspensions or slurries of nano-crystals (with diameters of generally less than 30 nm) by continuous flow through a heated, high pressure reaction pipe (typically, 200–400°C, 6000–8000 psi). Flow at pressure is maintained using a nozzle at the down-stream end of the reaction tube. Crystallite formation occurs during the solution’s brief residence time (<30 s) in the reaction pipe. Control over crystalline phase and, in some cases, particle morphology can be tailored by selecting the appropriate feed chemistry and processing conditions. Using bench-scale equipment, RTDS is capable of producing nano-crystalline particulate material at rates of up to ≈500 gm of solids per hour. The RTDS processing and characterization of nano-crystalline zirconium-, titanium-, and iron-based oxide and oxyhydroxide particulates are reviewed.
ISSN 03615235
Age Range 18 to 22 years ♦ above 22 year
Educational Use Research
Education Level UG and PG
Learning Resource Type Article
Publisher Date 1998-01-01
Publisher Place New York
e-ISSN 1543186X
Journal Journal of Electronic Materials
Volume Number 27
Issue Number 10
Page Count 5
Starting Page 1068
Ending Page 1072

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Source: SpringerLink