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Author Dinh, L. N. ♦ Schildbach, M. A. ♦ Balooch, M. ♦ McLean, W. II
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword MATERIALS SCIENCE ♦ ZINC COMPOUNDS ♦ ZINC OXIDES ♦ THIN FILMS ♦ STOICHIOMETRY ♦ GRAIN SIZE ♦ ADHESION ♦ CATHODOLUMINESCENCE ♦ DEPOSITION ♦ X-RAY DIFFRACTION ♦ ELECTRON MICROSCOPY
Abstract The dependence of stoichiometry, grain size, cathodoluminescence colors, adhesion, and surface morphology of zinc oxide films, deposited by a Cu-vapor laser at room temperature, as a function of oxygen ambient pressure during synthesis were investigated. Auger electron spectroscopy showed that ZnO films with a Zn/O ratio close to 1 were obtained at oxygen pressures {gt}10{sup {minus}1}&hthinsp;Torr. X-ray diffraction revealed that pulsed laser deposited zinc oxide films were composed mainly of nanocrystals, the average grain size of which grew from 5 to 17.5 nm as the oxygen pressure was increased from 10{sup {minus}5} to 1 Torr. The surface morphology of the films, as determined by secondary electron microscopy, also exhibited increasing roughness as the grain size increased. Films grown in an oxygen pressure {gt}1.5{times}10{sup {minus}1}&hthinsp;Torr glowed blue under electron bombardment, while slightly substoichiometric films glowed white under similar excitation. Films deposited in an oxygen background pressure up to 1.5{times}10{sup {minus}1}&hthinsp;Torr exhibited good adhesion to substrates. Deposition rate on the order of 4.6 nm/s was obtained. {copyright} {ital 1999 American Institute of Physics.}
ISSN 00218979
Educational Use Research
Learning Resource Type Article
Publisher Date 1999-07-01
Publisher Place United States
Journal Journal of Applied Physics
Volume Number 86
Issue Number 2


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