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Author Oates, William S. ♦ Smith, Ralph C.
Source CiteSeerX
Content type Text
File Format PDF
Subject Domain (in DDC) Computer science, information & general works ♦ Data processing & computer science
Subject Keyword Piezoelectric Nanopositioning Stage ♦ Nonlinear Optimal Tracking Control ♦ Control Design ♦ Piezoelectric Material ♦ Broad Frequency Range ♦ Low Frequency ♦ Large Displacement ♦ Excellent Position Control ♦ Large Region ♦ Piezoelectric Constitutive Law ♦ Nonlinear Optimal Control Design ♦ Three-dimensional Nanometer-scale Lithography ♦ Open Loop ♦ Constitutive Behavior ♦ Rate-dependent Hystereis ♦ High Performance Nanopositioning Stage ♦ Hz Khz ♦ Desired Reference Signal ♦ Atomic Force Microscopy ♦ Low Field Level ♦ Stringent Position Control ♦ Performance Enhancement ♦ Thermal Relaxation ♦ Linear Optimal Control
Abstract High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range. Piezoelectric materials, which are typically employed in nanopositioining stages, provide excellent position control when driven at relatively low frequency and low field levels. However, in applications where the stage operates over a relatively large region (microns to millimeters) and broad frequency range (Hz- kHz), piezoelectric materials often exhibit nonlinear and rate-dependent hystereis which requires control designs that can effectively accommodate such behavior. In this paper, a nonlinear, thermal-relaxation, piezoelectric constitutive law is incorporated into an open loop optimal tracking control design to accurately track a desired reference signal when nonlinearities, thermal relaxation and hyteresis are present. A comparison between linear optimal control and the nonlinear optimal control design is given to illustrate performance enhancements when the constitutive behavior is included in the control design.
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research
Education Level UG and PG ♦ Career/Technical Study