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Author Tetrachloride, Titanium ♦ Nadal, M. ♦ Teyss, F.
Source CiteSeerX
Content type Text
File Format PDF
Subject Domain (in DDC) Computer science, information & general works ♦ Data processing & computer science
Subject Keyword Deposition Condition ♦ Titanium Nitride ♦ Titanium Tetrachloride ♦ Molar Fraction ♦ Deposition Temperature ♦ X-ray Diffraction ♦ Cold Extrusion Nozzle ♦ Depm-sensing Indentation ♦ Following Parameter ♦ Numerous Technological Application ♦ Atmospheric Pressure ♦ Milling Tool ♦ Grain Size ♦ Complete Factorial Design ♦ Die Scherrer Method ♦ Diffusion Barrier ♦ Initial Gas Mixture ♦ Texture Coefficient ♦ Mechanical Property ♦ Die Deposition Rate
Abstract Abstract. TiN has been used in numerous technological applications including: cutting or milling tools and inserts, cold extrusion nozzles and punches, forming or stamping tools, and diffusion barrier. It is currendy deposited from an initial gas mixture composed of hydrogen, ammonia and titanium tetrachloride. This paper reports on the optimization of its deposition conditions at atmospheric pressure. A complete factorial design with three factors and two levels, thus requiring 2^=8 experiments, has been carried out. The following parameters were selected: the deposition temperature, the molar fraction of titanium tetrachloride and the molar fraction of ammonia. The influence of these factors on die deposition rate, the grain size estimated by die Scherrer method and the texture coefficient as determined by X-ray diffraction were studied. The mechanical properties of the coatings (microhardness, Young's modulus) were measured by depm-sensing indentation. 1.
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research
Education Level UG and PG ♦ Career/Technical Study
Learning Resource Type Article