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Author Boone, Justin ♦ Krishnan, Subramanian ♦ Bhansali, Shekhar
Source CiteSeerX
Content type Text
File Format PDF
Subject Domain (in DDC) Computer science, information & general works ♦ Data processing & computer science
Subject Keyword High Frequency ♦ Novel Filling Method ♦ Db Insertion Loss ♦ Reflection Coefficient ♦ High Input Output Ratio ♦ Outer Diameter ♦ Ghz-to-60 Ghz ♦ Measurement Result ♦ Coplanar Waveguide ♦ Coaxial Theory ♦ Inner Diameter ♦ Deep Reactive Ion ♦ Silicon Structure ♦ Good Signal Transmission ♦ Inner Outer Diameter Ratio ♦ Silicon Substrate ♦ Transition Demonstrate Good Result ♦ Radio Frequency ♦ Wafer Vertical Micro-coaxial Transition ♦ Silver Paste ♦ Coaxial Vias ♦ Standard Photolithography Technique ♦ Durable Design ♦ Commercial Product
Abstract Abstract—A through wafer vertical micro-coaxial transition flushed in a silicon substrate has been designed, fabricated, and tested. The transition has been designed using radio frequency (RF) coaxial theory and consists of a 100 µm inner diameter and a 300 µm outer diameter, which corresponded to a 1: 3 inner/outer diameter ratio. The transition’s through silicon structure has been achieved using standard photolithography techniques and Bosch’s process for deep reactive ion etching (DRIE). The coaxial vias of the transition have been successfully metalized with a diluted silver paste using a novel filling method. To measure the behavior of the transition at high frequencies, coplanar waveguide (CPW) lines matched at 50 ohms have been integrated on the front and backside of the device. Measurement results show that the transition demonstrate good results with a reflection coefficient better than −10 dB at high frequencies from 15 GHz-to-60 GHz. Results also indicate that the transition has good signal transmission with less than −1.8 dB insertion loss up to 65 GHz. By eliminating the need for rigorous bonding techniques, the transition is a low-cost and durable design that can produce high input/output ratios ideal for commercial products. 1.
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research
Education Level UG and PG ♦ Career/Technical Study
Publisher Date 2013-01-01