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Source CiteSeerX
Content type Text
File Format PDF
Subject Domain (in DDC) Computer science, information & general works ♦ Data processing & computer science
Subject Keyword Automatic Installation ♦ Middle-frequency Discharge ♦ Nanostructured Coating ♦ Oil-free Plasma ♦ Magnetron Spattering Deposition ♦ Mi-crocontrolled Management ♦ Inverter Source ♦ Reactive Coating ♦ Substrate Rotation ♦ Current Stabilization ♦ Oil-free High-vacuum Pumping ♦ Power Discharge ♦ Mm Cathode ♦ Mag-netic Field ♦ Kv Source ♦ Gaseous Environment ♦ Disk-shaped Magnetron Spatter-ing System ♦ Vacuum Chamber ♦ Magnetron System ♦ Biocompatible Oxide-nitride Coating ♦ Diode Breakdown ♦ Cyclical Maintainability ♦ Nano-structured Coating ♦ Discharge Supply ♦ Process Deposi-tion ♦ Optimal Configuration ♦ Equal Erosion ♦ Output Voltage ♦ Automatic Creation ♦ Medical Implant
Abstract tron spattering deposition for producing nano-structured coatings has been developed. The instal-lation provides oil-free high-vacuum pumping and automatic creation of gaseous environment through three channels. The deposition of coatings is carried out by a disk-shaped magnetron spatter-ing system with an optimal configuration of mag-netic field. The magnetron system produces an equal erosion of 200 mm cathode. An inverter source for discharge supply with the modulation of output voltage and assured nullification by fre-quency equal to 10–60 kHz was produced. The mi-crocontrolled management of a source makes it possible to do the deposition of reactive coatings by using the regime of the current stabilization or power discharge without the diode breakdown. A vacuum chamber includes 20 kV source of ions for the cyclical maintainability of process deposi-tion during substrate rotation. The installation is applied for the production of biocompatible oxide-nitride coatings for medical implants. 1.
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research
Education Level UG and PG ♦ Career/Technical Study