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Author Córdoba, R. ♦ Teresa, J. M. De ♦ Fernández-Pacheco, A. ♦ Strichovanec, P.
Source CiteSeerX
Content type Text
File Format PDF
Subject Domain (in DDC) Computer science, information & general works ♦ Data processing & computer science
Subject Keyword Transmission Electron Microscopy ♦ Focused-electron Ion-beam-induced Nanodeposits ♦ Deposition Rate ♦ Deposit Consist ♦ Gas-injection System ♦ Systematic Study ♦ Beam Energy ♦ Pt Deposition ♦ Ion Column ♦ Vary Little 2-4 ♦ Chemical Vapour Deposition ♦ Previous Study ♦ Pt Deposit ♦ Local Deposition ♦ Metallic Material ♦ Dual Beam Equipment ♦ Fibid Pt Deposit ♦ Major Application ♦ Beam Energy 2-4 ♦ Targeted Place ♦ Focused-electron Ion-beam-induced Deposition ♦ Febid Pt Deposit ♦ Precursor Material ♦ Fibid Pt ♦ Carbonaceous Matrix ♦ Focused Electron ♦ Controllable Nanometric Lateral Size ♦ Dual Beam System ♦ Pt-rich Inclusion
Abstract Focused-Electron/Ion-Beam-Induced Deposition (FEBID and FIBID respectively) of metallic materials is one major application of “Dual Beam ” systems, which integrate electron and ion columns. FEBID and FIBID allow local deposition in the targeted place with controllable nanometric lateral size and thickness [1]. FEBID and FIBID of materials is a Chemical Vapour Deposition (CVD) induced by focused electron and ion-beam, respectively [2, 3]. Previous studies on FEBID Pt deposits have shown the decrease of the deposition rate as a function of the beam energy [2-4]. However in the case of FIBID Pt deposits, the deposition rate was found to vary little [2-4]. The microstructure of the Pt deposits have been studied by means of transmission electron microscopy (TEM) [4]. These studies showed that the deposits consist of Pt-rich inclusions in a carbonaceous matrix. In this contribution we present a systematic study of the volume per dose and microstructure of FEBID and FIBID Pt nanodeposits as a function of the beam energy and current [5]. Our experiments were performed in a Dual Beam equipment (Nova 200 NanoLab). For Pt deposition, an automatized gas-injection system (GIS) was used with (CH3)3Pt(CpCH3) as the precursor material. The volume per dose was calculated after performing cross-sections of the
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Age Range above 22 year
Educational Use Research
Education Level UG and PG ♦ Career/Technical Study