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Author Voutsas, A. T. ♦ Kisdarjono, H. ♦ Solanki, R. ♦ Kumar, A.
Source CiteSeerX
Content type Text
File Format PDF
Subject Domain (in DDC) Computer science, information & general works ♦ Data processing & computer science
Subject Keyword Numerical Simulation ♦ Ultra-rapid Heating ♦ Nanosecond-pulse Excimer Laser ♦ Si-thin Film ♦ Silicon Thin-films ♦ Laser-induced Lateral Crystallization ♦ Nanosecond-pulsed Excimer Laser ♦ New Approach ♦ Temporal Evolution ♦ Modeling Capability ♦ Various Stage ♦ Scenario Corresponds ♦ High Quality Poly-si Film ♦ Rapid Heating ♦ Specific Demand ♦ A-si Film ♦ Laser Irradiation ♦ Phase-change Computation ♦ Localized Melting ♦ Thin Si Film ♦ Undercooled Liquid ♦ Temperature Profile ♦ Traditional Equilibrium Formulation ♦ Standard Finite-element Cfd Software Package ♦ Heatinglcooling Cycle
Abstract In this paper we present our work on the numerical simulation of ultra-rapid heating (with phase-change) of silicon thin-films, which are irradiated with nanosecond-pulsed excimer laser. Our excimer-laser-annealing (ELA) modeling capability is based on a standard finite-element CFD software package, which, however, has been modified to accommodate the specific demands of very rapid heating of thin Si films. In that sense, we've abandoned the traditional equilibrium formulation (i.e. enthalpy method), for phase-change computations, and have adopted a new approach that allows superheated solid and undercooled liquid to exist during the various stages of the heatinglcooling cycle. Our model has been successfully applied to predict the shape and temporal evolution of temperature profiles in the case of localized melting of silicon thin-films by excimer laser irradiation. Such scenario corresponds to conditions typically encountered in laser-induced lateral crystallization of a-Si films, a process that has recently attracted attention for the formation of high quality poly-Si films. 1
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research
Education Level UG and PG ♦ Career/Technical Study
Learning Resource Type Article