Access Restriction

Author Choi, Yang-Kyu
Source CiteSeerX
Content type Text
File Format PDF
Language English
Subject Domain (in DDC) Computer science, information & general works ♦ Data processing & computer science
Subject Keyword Sub-lithographic Pattering Technology ♦ Key Element ♦ Metal Gate Technology ♦ High-performance Cmos Finfets ♦ Novel Double-gate Device Structure ♦ Terabit Era ♦ Work-function Engineering ♦ Threshold Voltage Adjustment ♦ Source Drain ♦ Nanoelectronics Regime ♦ Channel Roughness ♦ Carrier Mobility ♦ Crystal Orientation Effect ♦ Low Series Resistance ♦ Nm Gate Length ♦ Process Variation Effect ♦ Reliability Issue
Educational Role Student ♦ Teacher
Age Range above 22 year
Educational Use Research
Education Level UG and PG ♦ Career/Technical Study
Learning Resource Type Article
Publisher Date 2004-01-01
Publisher Institution 34 Journal of VLSI design & Communication Systems (VLSICS) Vol.2, No.1