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Author Kim, Young-Cheol ♦ Kim, Hyun-Jun ♦ Lee, Hyo-Chang ♦ Chung, Chin-Wook
Source United States Department of Energy Office of Scientific and Technical Information
Content type Text
Language English
Subject Keyword PLASMA PHYSICS AND FUSION TECHNOLOGY ♦ ARGON ♦ ELECTRIC CURRENTS ♦ ELECTRIC POTENTIAL ♦ ELECTRODES ♦ JOULE HEATING ♦ PLASMA DENSITY ♦ POWER LOSSES ♦ TRANSFORMERS
Abstract In a plasma discharge system, the power loss at powered line, matching network, and other transmission line can affect the discharge characteristics such as the power transfer efficiency, voltage and current at powered electrode, and plasma density. In this paper, we propose a method to reduce power loss by using a step down transformer mounted between the matching network and the powered electrode in a capacitively coupled argon plasma. This step down transformer decreases the power loss by reducing the current flowing through the matching network and transmission line. As a result, the power transfer efficiency was increased about 5%–10% by using a step down transformer. However, the plasma density was dramatically increased compared to no transformer. This can be understood by the increase in ohmic heating and the decrease in dc-self bias. By simply mounting a transformer, improvement of discharge efficiency can be achieved in capacitively coupled plasmas.
ISSN 1070664X
Educational Use Research
Learning Resource Type Article
Publisher Date 2015-12-15
Publisher Place United States
Journal Physics of Plasmas
Volume Number 22
Issue Number 12


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